PIC Modeling Of Collisional Skin Depth In RF-Driven Atmospheric Pressure Plasmas
Atmospheric pressure plasmas have application in plasma processing and plasma lighting. One common technique for creating these plasmas is to use RF to drive a discharge in a gas column. A main unexplained feature of these discharges is a radial contraction of the plasma, believed to depend in part...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | Atmospheric pressure plasmas have application in plasma processing and plasma lighting. One common technique for creating these plasmas is to use RF to drive a discharge in a gas column. A main unexplained feature of these discharges is a radial contraction of the plasma, believed to depend in part on the depth to which the RF wave penetrates the gas column. We present collisional particle-in-cell (PIC) simulations of such a system, specifically looking at how the collisions modify the plasma skin depth for these parameters and geometries. We find the skin depth changes roughly 30% from 0.53 mm to 0.71 mm as the temperature increases from 0 to 500 eV for parameters relevant to atmospheric pressure plasmas in use today. |
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ISSN: | 0094-243X 1551-7616 |
DOI: | 10.1063/1.2800539 |