Mode transitions and hysteresis in inductively coupled plasmas

Optical emission spectroscopy as a noninvasive plasma diagnostic was employed to study mode transitions and hysteresis in an inductively coupled plasma in Ar and Ar ∕ N 2 mixtures. Using selected Ar lines, basic plasma parameters, relevant to the analysis of the mode transitions, were evaluated. Small changes of the electron energy distribution function in the vicinity of the mode transition were detected. The role of metastable Ar atoms in mode transitions and in a hysteresis was clarified. Enhanced production of metastables in the hysteresis region as well as faster transitions in plasmas with higher influence of metastables were observed.