Nanoscale defect formation on InP (111) surfaces after MeV Sb implantation
We have studied the surface modifications as well as the surface roughness of the InP(111) surfaces after 1.5 MeV Sb ion implantations. A scanning probe microscope has been utilized to investigate the ion-implanted InP(111) surfaces. We observe the formation of nanoscale defect structures on the InP...
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Veröffentlicht in: | Journal of applied physics 2006-01, Vol.99 (1), p.014304-014304-7 |
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creator | Paramanik, Dipak Pradhan, Asima Varma, Shikha |
description | We have studied the surface modifications as well as the surface roughness of the InP(111) surfaces after 1.5 MeV Sb ion implantations. A scanning probe microscope has been utilized to investigate the ion-implanted InP(111) surfaces. We observe the formation of nanoscale defect structures on the InP surface. The density, height, and size of the nanostructures have been investigated here as a function of ion fluence. The rms surface roughness, of the ion implanted InP surfaces, has also been investigated. Raman-scattering results demonstrate that at the critical fluence, where the decrease in surface roughness occurs, the InP lattice becomes amorphous. |
doi_str_mv | 10.1063/1.2150262 |
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A scanning probe microscope has been utilized to investigate the ion-implanted InP(111) surfaces. We observe the formation of nanoscale defect structures on the InP surface. The density, height, and size of the nanostructures have been investigated here as a function of ion fluence. The rms surface roughness, of the ion implanted InP surfaces, has also been investigated. Raman-scattering results demonstrate that at the critical fluence, where the decrease in surface roughness occurs, the InP lattice becomes amorphous.</description><identifier>ISSN: 0021-8979</identifier><identifier>EISSN: 1089-7550</identifier><identifier>DOI: 10.1063/1.2150262</identifier><identifier>CODEN: JAPIAU</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>ANTIMONY IONS ; CRYSTAL DEFECTS ; INDIUM PHOSPHIDES ; ION IMPLANTATION ; MATERIALS SCIENCE ; MEV RANGE 01-10 ; MICROSCOPES ; NANOSTRUCTURES ; RAMAN EFFECT ; RAMAN SPECTRA ; ROUGHNESS ; SEMICONDUCTOR MATERIALS ; SURFACE TREATMENTS ; SURFACES</subject><ispartof>Journal of applied physics, 2006-01, Vol.99 (1), p.014304-014304-7</ispartof><rights>2006 American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c312t-a71a84c4182559d77bf1cfa4d075e5f9a939877ab0e4887ead4d28f36a6e6b0c3</citedby><cites>FETCH-LOGICAL-c312t-a71a84c4182559d77bf1cfa4d075e5f9a939877ab0e4887ead4d28f36a6e6b0c3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/jap/article-lookup/doi/10.1063/1.2150262$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>230,314,776,780,790,881,1553,4497,27903,27904,76130,76136</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/20787787$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Paramanik, Dipak</creatorcontrib><creatorcontrib>Pradhan, Asima</creatorcontrib><creatorcontrib>Varma, Shikha</creatorcontrib><title>Nanoscale defect formation on InP (111) surfaces after MeV Sb implantation</title><title>Journal of applied physics</title><description>We have studied the surface modifications as well as the surface roughness of the InP(111) surfaces after 1.5 MeV Sb ion implantations. A scanning probe microscope has been utilized to investigate the ion-implanted InP(111) surfaces. We observe the formation of nanoscale defect structures on the InP surface. The density, height, and size of the nanostructures have been investigated here as a function of ion fluence. The rms surface roughness, of the ion implanted InP surfaces, has also been investigated. Raman-scattering results demonstrate that at the critical fluence, where the decrease in surface roughness occurs, the InP lattice becomes amorphous.</description><subject>ANTIMONY IONS</subject><subject>CRYSTAL DEFECTS</subject><subject>INDIUM PHOSPHIDES</subject><subject>ION IMPLANTATION</subject><subject>MATERIALS SCIENCE</subject><subject>MEV RANGE 01-10</subject><subject>MICROSCOPES</subject><subject>NANOSTRUCTURES</subject><subject>RAMAN EFFECT</subject><subject>RAMAN SPECTRA</subject><subject>ROUGHNESS</subject><subject>SEMICONDUCTOR MATERIALS</subject><subject>SURFACE TREATMENTS</subject><subject>SURFACES</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp1kE1LAzEQhoMoWKsH_0HAiz1szWQ3m-QiSKlaqR_gxzXMZhNcaXdLEg_-e7fd4k0YmMvzvsw8hJwDmwIr8yuYchCMl_yAjIApnUkh2CEZMcYhU1rqY3IS4xdjACrXI_LwhG0XLa4crZ13NlHfhTWmpmtpP4v2hV4CwITG7-DRukjRJxfoo_ugrxVt1psVtmnHn5Ijj6vozvZ7TN5v52-z-2z5fLeY3SwzmwNPGUpAVdgCFBdC11JWHqzHomZSOOE16lwrKbFirlBKOqyLmiufl1i6smI2H5OLobeLqTHRNsnZT9u1bX-94Uz2YSV7ajJQNnQxBufNJjRrDD8GmNmqMmD2qnr2emC3Zbtf_of_fJnBl-l95b8ycm6n</recordid><startdate>20060101</startdate><enddate>20060101</enddate><creator>Paramanik, Dipak</creator><creator>Pradhan, Asima</creator><creator>Varma, Shikha</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20060101</creationdate><title>Nanoscale defect formation on InP (111) surfaces after MeV Sb implantation</title><author>Paramanik, Dipak ; Pradhan, Asima ; Varma, Shikha</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c312t-a71a84c4182559d77bf1cfa4d075e5f9a939877ab0e4887ead4d28f36a6e6b0c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>ANTIMONY IONS</topic><topic>CRYSTAL DEFECTS</topic><topic>INDIUM PHOSPHIDES</topic><topic>ION IMPLANTATION</topic><topic>MATERIALS SCIENCE</topic><topic>MEV RANGE 01-10</topic><topic>MICROSCOPES</topic><topic>NANOSTRUCTURES</topic><topic>RAMAN EFFECT</topic><topic>RAMAN SPECTRA</topic><topic>ROUGHNESS</topic><topic>SEMICONDUCTOR MATERIALS</topic><topic>SURFACE TREATMENTS</topic><topic>SURFACES</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Paramanik, Dipak</creatorcontrib><creatorcontrib>Pradhan, Asima</creatorcontrib><creatorcontrib>Varma, Shikha</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Paramanik, Dipak</au><au>Pradhan, Asima</au><au>Varma, Shikha</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Nanoscale defect formation on InP (111) surfaces after MeV Sb implantation</atitle><jtitle>Journal of applied physics</jtitle><date>2006-01-01</date><risdate>2006</risdate><volume>99</volume><issue>1</issue><spage>014304</spage><epage>014304-7</epage><pages>014304-014304-7</pages><issn>0021-8979</issn><eissn>1089-7550</eissn><coden>JAPIAU</coden><abstract>We have studied the surface modifications as well as the surface roughness of the InP(111) surfaces after 1.5 MeV Sb ion implantations. A scanning probe microscope has been utilized to investigate the ion-implanted InP(111) surfaces. We observe the formation of nanoscale defect structures on the InP surface. The density, height, and size of the nanostructures have been investigated here as a function of ion fluence. The rms surface roughness, of the ion implanted InP surfaces, has also been investigated. Raman-scattering results demonstrate that at the critical fluence, where the decrease in surface roughness occurs, the InP lattice becomes amorphous.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><doi>10.1063/1.2150262</doi></addata></record> |
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subjects | ANTIMONY IONS CRYSTAL DEFECTS INDIUM PHOSPHIDES ION IMPLANTATION MATERIALS SCIENCE MEV RANGE 01-10 MICROSCOPES NANOSTRUCTURES RAMAN EFFECT RAMAN SPECTRA ROUGHNESS SEMICONDUCTOR MATERIALS SURFACE TREATMENTS SURFACES |
title | Nanoscale defect formation on InP (111) surfaces after MeV Sb implantation |
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