Homojunction photodiodes based on Sb - doped p -type ZnO for ultraviolet detection
ZnO -based p - n homojunctions were grown using molecular-beam epitaxy. Sb and Ga were used as dopants to achieve the p -type and n -type ZnO , respectively. The mesa devices were fabricated by employing wet etching and standard photolithography techniques. Al ∕ Ti metal was deposited by electron-be...
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Veröffentlicht in: | Applied physics letters 2006-02, Vol.88 (9), p.092103-092103-3 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
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Zusammenfassung: | ZnO
-based
p
-
n
homojunctions were grown using molecular-beam epitaxy. Sb and Ga were used as dopants to achieve the
p
-type and
n
-type
ZnO
, respectively. The mesa devices were fabricated by employing wet etching and standard photolithography techniques.
Al
∕
Ti
metal was deposited by electron-beam evaporation and annealed to form Ohmic contacts. Current-voltage measurements of the device showed good rectifying behavior, from which a turn-on voltage of about
2
V
was obtained. Very good response to ultraviolet light illumination was observed from photocurrent measurements. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.2178470 |