Sn Plasma Focus Discharge for EUV Radiation Source

A small plasma focus device was constructed for the EUV radiation experiment. The storage energy of capacitor bank is 3.4 kj, and the maximum discharge current is 140 kA. Although the device was not well optimized for strong pinch, EUV radiation was observed from the focus plasma. The plasma dynamic...

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Bibliographische Detailangaben
Hauptverfasser: Takasugi, Keiichi, Umeda, Takeshi, Kiuchi, Ena, Hayashi, Takuya
Format: Tagungsbericht
Sprache:eng
Schlagworte:
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Zusammenfassung:A small plasma focus device was constructed for the EUV radiation experiment. The storage energy of capacitor bank is 3.4 kj, and the maximum discharge current is 140 kA. Although the device was not well optimized for strong pinch, EUV radiation was observed from the focus plasma. The plasma dynamics was affected by electrode material, and the use of Sn electrode was proved to be effective for producing Sn plasma.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.2159358