Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage

This article presents a useful measuring system for the simultaneous measurement of six-degrees-of-freedom motion errors of a moving stage. The system integrates a miniature fiber coupled laser interferometer with specially designed optical paths and quadrant detectors, capable of measuring six-degrees-of-freedom motion errors. Using this model, the proposed measuring method provides rapid performance, simplicity of setup, and preprocess verification of a linear stage. The experimental setups and measuring procedures, and a systematic calculated method for the error verification are presented in the paper. The system's resolution of measuring straightness error component is about 25 nm . The resolution of measuring the pitch and yaw angular error component is about 0.06 arcs . With the comparison between the HP calibration system and the proposed system in the measuring range of 120 mm , the system accuracy of measuring straightness error and angular error is within the range ± 0.6 μ m and ± 0.3 arcs .