Optimization of high B{sub sat} FeCo films for write pole applications
FeCo films and their lamination with ultrathin NiFe layers down to 5 A were deposited using dc magnetron sputtering techniques. Soft magnetic FeCo films were obtained at an optimal target power of 500 W and an optimal deposition pressure of 2 mTorr with high saturation flux density, B{sub sat}>2....
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Veröffentlicht in: | Journal of applied physics 2005-05, Vol.97 (10) |
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Hauptverfasser: | , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | FeCo films and their lamination with ultrathin NiFe layers down to 5 A were deposited using dc magnetron sputtering techniques. Soft magnetic FeCo films were obtained at an optimal target power of 500 W and an optimal deposition pressure of 2 mTorr with high saturation flux density, B{sub sat}>2.4 T, and low easy-axis coercivity, H{sub ce}{ |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.1853951 |