Interface intermixing and in-plane grain size in aluminum transition-metal bilayers

The correlation between grain size and intermixing in sputter-deposited bilayers of the form X∕Al and Al∕X (where X=Ta, W, Ir, and Os) has been investigated by in-plane grazing-incidence x-ray diffraction. We have found no correlation between grain size and intermixing at the interface and our data...

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Veröffentlicht in:Journal of applied physics 2004-12, Vol.96 (12), p.7278-7282
Hauptverfasser: Buchanan, J. D. R., Hase, T. P. A., Tanner, B. K., Powell, C. J., Egelhoff, W. F.
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Sprache:eng
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Zusammenfassung:The correlation between grain size and intermixing in sputter-deposited bilayers of the form X∕Al and Al∕X (where X=Ta, W, Ir, and Os) has been investigated by in-plane grazing-incidence x-ray diffraction. We have found no correlation between grain size and intermixing at the interface and our data provide strong evidence against the postulate that the asymmetry in intermixing arises from the Harrison type-C mechanism of fast diffusion along grain boundaries or dislocations.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.1818715