Three-dimensional femtosecond laser nanolithography of crystals

So far, nanostructuring of hard optical crystals has been exclusively limited to their surface, as stress-induced crack formation and propagation render high-precision volume processes ineffective 1 , 2 . Here, we show that the rate of nanopore chemical etching in the popular laser crystals yttrium...

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Veröffentlicht in:	Nature photonics 2019-02, Vol.13 (2), p.105-109
Hauptverfasser:	Ródenas, Airán, Gu, Min, Corrielli, Giacomo, Paiè, Petra, John, Sajeev, Kar, Ajoy K., Osellame, Roberto
Format:	Artikel
Sprache:	eng
Schlagworte:	142/126 639/301/1019/1021 639/624/1107/1109 Aluminum Applied and Technical Physics Chemical etching Crack propagation Crystal optics Crystals Direct laser writing Etching Gratings (spectra) Lasers Letter Nanotechnology Optical waveguides Optics Organic chemistry Physics Physics and Astronomy Porosity Quantum Physics Sapphire Solid state lasers Stress propagation YAG lasers Yttrium
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Beschreibung
Zusammenfassung:	So far, nanostructuring of hard optical crystals has been exclusively limited to their surface, as stress-induced crack formation and propagation render high-precision volume processes ineffective 1 , 2 . Here, we show that the rate of nanopore chemical etching in the popular laser crystals yttrium aluminium garnet and sapphire can be enhanced by more than five orders of magnitude (from
ISSN:	1749-4885 1749-4893
DOI:	10.1038/s41566-018-0327-9