Growth of high-quality Bi2Se3 topological insulators using (Bi1-xInx)2Se3 buffer layers
In this article, the authors first report on the optimum growth parameters for (Bi1-xInx)2Se3 alloys of arbitrary composition using molecular beam epitaxy. It is found that smooth, single-phase films can only be obtained by using a sequential growth and annealing method to seed the film, after which...
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Veröffentlicht in: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2018-03, Vol.36 (2) |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | In this article, the authors first report on the optimum growth parameters for (Bi1-xInx)2Se3 alloys of arbitrary composition using molecular beam epitaxy. It is found that smooth, single-phase films can only be obtained by using a sequential growth and annealing method to seed the film, after which normal codeposition growth can be used. The topological insulator Bi2Se3 is then grown on top of various (Bi1-xInx)2Se3 buffers and the electrical properties measured. For Bi2Se3 films grown on high-quality buffer layers, the mobility is greatly enhanced and the carrier density reduced compared to growth directly on sapphire substrates, indicating a significant improvement in film quality. The use of an almost lattice-matched trivially insulating buffer layer is therefore crucial to the growth of high-quality topological insulators on arbitrary substrates. |
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ISSN: | 2166-2746 2166-2754 |
DOI: | 10.1116/1.5015968 |