Ellipsometric modeling of serially bi-deposited glancing-angle-deposition coatings

Ellipsometric modeling of serially bi-deposited glancing-angle-deposition (GLAD) coatings with a high degree of accuracy is imperative for multilayer coatings. High-precision dispersion curves are demonstrated for a wide variety of applications.

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Bibliographische Detailangaben
Veröffentlicht in:	Applied optics (2004) 2020-02, Vol.59 (5), p.A26-A30
Hauptverfasser:	Smith, C, MacNally, S, Oliver, J B
Format:	Artikel
Sprache:	eng
Schlagworte:	Coatings Deposition Dispersion curve analysis Ellipsometry Modelling Multilayers
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Ellipsometric modeling of serially bi-deposited glancing-angle-deposition (GLAD) coatings with a high degree of accuracy is imperative for multilayer coatings. High-precision dispersion curves are demonstrated for a wide variety of applications.
ISSN:	1559-128X 2155-3165 1539-4522
DOI:	10.1364/AO.59.000A26