One-dimensional stitching interferometry assisted by a triple-beam interferometer

In this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping a...

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Veröffentlicht in:	Optics express 2017-04, Vol.25 (8), p.9393-9405
Hauptverfasser:	Xue, Junpeng, Huang, Lei, Gao, Bo, Kaznatcheev, Konstantine, Idir, Mourad
Format:	Artikel
Sprache:	eng
Schlagworte:	Fizeau interferometry Instrumentation, measurement, and metrology Interference Metrology OTHER INSTRUMENTATION Spatial resolution Stitching interferometry Systems design Temperature X-ray mirrors
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