Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library
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| Veröffentlicht in: | Ultramicroscopy 2015-07, Vol.154 (C), p.15-28 |
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| container_end_page | 28 |
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| container_issue | C |
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| container_title | Ultramicroscopy |
| container_volume | 154 |
| creator | Villarrubia, J.S. Vladár, A.E. Ming, B. Kline, R.J. Sunday, D.F. Chawla, J.S. List, S. |
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| doi_str_mv | 10.1016/j.ultramic.2015.01.004 |
| format | Article |
| fullrecord | <record><control><sourceid>crossref_osti_</sourceid><recordid>TN_cdi_osti_scitechconnect_1254034</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1016_j_ultramic_2015_01_004</sourcerecordid><originalsourceid>FETCH-LOGICAL-c326t-ee4229a71b8c417391d317c54da3dec36f496ce2deac22be668b9b6bf4ae09073</originalsourceid><addsrcrecordid>eNo1kMtOwzAQRS0EEqXwC8hinzB-1EmWqCovFboorC3HmdBUiVPZrhB_j6PCaqS5V0czh5BbBjkDpu73-bGP3gydzTmwRQ4sB5BnZMbKosp4wcU5mYEAmYmqYpfkKoQ9ADCQ5YzErTXOde6LYo82-tHRBPJjsOMB6YAmHD0O6CIdW_rdNXFHjWto2JkUpxUD6gZ6MDGid9jQvnMY6DFMRENf3zbv29U6G8Ym4ae09sb_XJOL1vQBb_7mnHw-rj6Wz9l68_SyfFhnVnAVM0TJeWUKVpdWskJUrBGssAvZGNGgFaqVlbLIGzSW8xqVKuuqVnUrDUIFhZiTuxN3DLHTwXYR7c6OzqVPNeMLCUKmkjqVpq-Dx1YffDekKzUDPQnWe_0vWE-CNTCdBItfaEdzCA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library</title><source>Elsevier ScienceDirect Journals</source><creator>Villarrubia, J.S. ; Vladár, A.E. ; Ming, B. ; Kline, R.J. ; Sunday, D.F. ; Chawla, J.S. ; List, S.</creator><creatorcontrib>Villarrubia, J.S. ; Vladár, A.E. ; Ming, B. ; Kline, R.J. ; Sunday, D.F. ; Chawla, J.S. ; List, S.</creatorcontrib><identifier>ISSN: 0304-3991</identifier><identifier>EISSN: 1879-2723</identifier><identifier>DOI: 10.1016/j.ultramic.2015.01.004</identifier><language>eng</language><publisher>Netherlands: Elsevier</publisher><ispartof>Ultramicroscopy, 2015-07, Vol.154 (C), p.15-28</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c326t-ee4229a71b8c417391d317c54da3dec36f496ce2deac22be668b9b6bf4ae09073</citedby><cites>FETCH-LOGICAL-c326t-ee4229a71b8c417391d317c54da3dec36f496ce2deac22be668b9b6bf4ae09073</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,777,781,882,27905,27906</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/1254034$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Villarrubia, J.S.</creatorcontrib><creatorcontrib>Vladár, A.E.</creatorcontrib><creatorcontrib>Ming, B.</creatorcontrib><creatorcontrib>Kline, R.J.</creatorcontrib><creatorcontrib>Sunday, D.F.</creatorcontrib><creatorcontrib>Chawla, J.S.</creatorcontrib><creatorcontrib>List, S.</creatorcontrib><title>Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library</title><title>Ultramicroscopy</title><issn>0304-3991</issn><issn>1879-2723</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><recordid>eNo1kMtOwzAQRS0EEqXwC8hinzB-1EmWqCovFboorC3HmdBUiVPZrhB_j6PCaqS5V0czh5BbBjkDpu73-bGP3gydzTmwRQ4sB5BnZMbKosp4wcU5mYEAmYmqYpfkKoQ9ADCQ5YzErTXOde6LYo82-tHRBPJjsOMB6YAmHD0O6CIdW_rdNXFHjWto2JkUpxUD6gZ6MDGid9jQvnMY6DFMRENf3zbv29U6G8Ym4ae09sb_XJOL1vQBb_7mnHw-rj6Wz9l68_SyfFhnVnAVM0TJeWUKVpdWskJUrBGssAvZGNGgFaqVlbLIGzSW8xqVKuuqVnUrDUIFhZiTuxN3DLHTwXYR7c6OzqVPNeMLCUKmkjqVpq-Dx1YffDekKzUDPQnWe_0vWE-CNTCdBItfaEdzCA</recordid><startdate>201507</startdate><enddate>201507</enddate><creator>Villarrubia, J.S.</creator><creator>Vladár, A.E.</creator><creator>Ming, B.</creator><creator>Kline, R.J.</creator><creator>Sunday, D.F.</creator><creator>Chawla, J.S.</creator><creator>List, S.</creator><general>Elsevier</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>201507</creationdate><title>Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library</title><author>Villarrubia, J.S. ; Vladár, A.E. ; Ming, B. ; Kline, R.J. ; Sunday, D.F. ; Chawla, J.S. ; List, S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c326t-ee4229a71b8c417391d317c54da3dec36f496ce2deac22be668b9b6bf4ae09073</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Villarrubia, J.S.</creatorcontrib><creatorcontrib>Vladár, A.E.</creatorcontrib><creatorcontrib>Ming, B.</creatorcontrib><creatorcontrib>Kline, R.J.</creatorcontrib><creatorcontrib>Sunday, D.F.</creatorcontrib><creatorcontrib>Chawla, J.S.</creatorcontrib><creatorcontrib>List, S.</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Ultramicroscopy</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Villarrubia, J.S.</au><au>Vladár, A.E.</au><au>Ming, B.</au><au>Kline, R.J.</au><au>Sunday, D.F.</au><au>Chawla, J.S.</au><au>List, S.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library</atitle><jtitle>Ultramicroscopy</jtitle><date>2015-07</date><risdate>2015</risdate><volume>154</volume><issue>C</issue><spage>15</spage><epage>28</epage><pages>15-28</pages><issn>0304-3991</issn><eissn>1879-2723</eissn><cop>Netherlands</cop><pub>Elsevier</pub><doi>10.1016/j.ultramic.2015.01.004</doi><tpages>14</tpages><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
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| ispartof | Ultramicroscopy, 2015-07, Vol.154 (C), p.15-28 |
| issn | 0304-3991 1879-2723 |
| language | eng |
| recordid | cdi_osti_scitechconnect_1254034 |
| source | Elsevier ScienceDirect Journals |
| title | Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-18T11%3A09%3A32IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref_osti_&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Scanning%20electron%20microscope%20measurement%20of%20width%20and%20shape%20of%2010%20nm%20patterned%20lines%20using%20a%20JMONSEL-modeled%20library&rft.jtitle=Ultramicroscopy&rft.au=Villarrubia,%20J.S.&rft.date=2015-07&rft.volume=154&rft.issue=C&rft.spage=15&rft.epage=28&rft.pages=15-28&rft.issn=0304-3991&rft.eissn=1879-2723&rft_id=info:doi/10.1016/j.ultramic.2015.01.004&rft_dat=%3Ccrossref_osti_%3E10_1016_j_ultramic_2015_01_004%3C/crossref_osti_%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |