Study of V and Y Shape Frank-Type Stacking Faults Formation in 4H-SiC Epilayer

Nomarski optical microscopic, KOH etching and synchrotron topographic studies are presented of faint needle-like surface morphological features in 4H-SiC homoepitaxial layers. Grazing incidence synchrotron white beam x-ray topographs show V shaped features which transmission topographs reveal to enc...

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Veröffentlicht in:	Materials science forum 2014-02, Vol.778-780, p.332-337
Hauptverfasser:	Raghothamachar, Balaji, Yang, Yu, Dudley, Michael, Sanchez, Edward, Hansen, Darren M., Mueller, Stephan G., Thomas, Bernd, Loboda, Mark J., Chung, Gil Yong, Wu, Fang Zhen, Byrapa, Sha Yan, Zhang, Jie, Wang, Huan Huan
Format:	Artikel
Sprache:	eng
Schlagworte:	Basal plane Burgers vector Defects Deflection Formations Stacking faults Synchrotrons Threading dislocations
Online-Zugang:	Volltext
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