Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

In this study, we focus on the resolution limits for quasi 2-D single lines synthesized via focused electron-beam-induced direct-write deposition at 5 and 30 keV in a scanning electron microscope. To understand the relevant proximal broadening effects, the substrates were thicker than the beam penet...

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Veröffentlicht in:	ACS applied materials & interfaces 2014-05, Vol.6 (10), p.7380-7387
Hauptverfasser:	Arnold, Georg, Timilsina, Rajendra, Fowlkes, Jason, Orthacker, Angelina, Kothleitner, Gerald, Rack, Philip D, Plank, Harald
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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