Formation of uni-directional ultrathin metallic YSi2 nanowires on Si(110)

Ultrathin YSi2 nanowires were grown epitaxially on the Si(110) surface. High-aspect-ratio nanowire growth is induced by the strongly anisotropic lattice-match between the silicide crystal lattice and the Si(110) surface, similar to the established formation of rare-earth silicide nanowires on Si(100...

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Veröffentlicht in:Applied physics letters 2013-08, Vol.103 (7)
Hauptverfasser: Hus, Saban M., Weitering, Hanno H.
Format: Artikel
Sprache:eng
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Zusammenfassung:Ultrathin YSi2 nanowires were grown epitaxially on the Si(110) surface. High-aspect-ratio nanowire growth is induced by the strongly anisotropic lattice-match between the silicide crystal lattice and the Si(110) surface, similar to the established formation of rare-earth silicide nanowires on Si(100). In contrast to the Si(100) case, however, YSi2 nanowires on Si(110) grow in a single orientation along the [11¯0] direction and exhibit a clear preference of nucleating at step edges when these edges are aligned along the [11¯0] growth direction. This suggests a promising avenue for the fabrication of regular nanowire arrays with controlled wire separation, by varying the miscut angle of the Si wafer. The nanowires are metallic and are embedded in a reconstructed Si(110)-(23×3)R54.7°-Y semiconducting surface layer.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4817529