Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties
► We demonstrate the exfoliation of high-quality single-crystal thin-films of YAG. ► Implantation dose and thermal exfoliation conditions were determined. ► Post-exfoliation high-temperature annealing process was optimized. ► Mechanical properties of the films were examined by nanoindentation techni...
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| Veröffentlicht in: | Optical materials 2012-11, Vol.35 (1), p.25-28 |
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| container_title | Optical materials |
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| creator | Gaathon, O. Adam, J.D. Krishnaswamy, S.V. Kysar, J.W. Bakhru, S. Bakhru, H. Welch, D.O. Osgood, R.M. |
| description | ► We demonstrate the exfoliation of high-quality single-crystal thin-films of YAG. ► Implantation dose and thermal exfoliation conditions were determined. ► Post-exfoliation high-temperature annealing process was optimized. ► Mechanical properties of the films were examined by nanoindentation technique.
We report on the fabrication of single-crystal thin films of Yttrium Aluminum Garnet (YAG, Y3Al5O12) obtained by thermal exfoliation from bulk crystals after deep He-ion implantation. The film qualities and exfoliation process were determined by AFM, optical microscopy, SEM, optical profilometer and nanoindentation. The resulting films were subjected to annealing at ∼1200°C to relax the residual strain and film curvature that arose from the ion implantation process. |
| doi_str_mv | 10.1016/j.optmat.2012.06.009 |
| format | Article |
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We report on the fabrication of single-crystal thin films of Yttrium Aluminum Garnet (YAG, Y3Al5O12) obtained by thermal exfoliation from bulk crystals after deep He-ion implantation. The film qualities and exfoliation process were determined by AFM, optical microscopy, SEM, optical profilometer and nanoindentation. The resulting films were subjected to annealing at ∼1200°C to relax the residual strain and film curvature that arose from the ion implantation process.</description><identifier>ISSN: 0925-3467</identifier><identifier>EISSN: 1873-1252</identifier><identifier>DOI: 10.1016/j.optmat.2012.06.009</identifier><language>eng</language><publisher>Oxford: Elsevier B.V</publisher><subject>Crystal Ion Slicing ; Exact sciences and technology ; Fundamental areas of phenomenology (including applications) ; Ion Implantation ; Optical materials ; Optics ; Physics ; Thin-film ; Yttrium Aluminum Garnet</subject><ispartof>Optical materials, 2012-11, Vol.35 (1), p.25-28</ispartof><rights>2012 Elsevier B.V.</rights><rights>2014 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c363t-3d5c31ee54e5073c9638b51286b941a268f545f5c44902f2df3a34e361a062f3</citedby><cites>FETCH-LOGICAL-c363t-3d5c31ee54e5073c9638b51286b941a268f545f5c44902f2df3a34e361a062f3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.optmat.2012.06.009$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>230,315,781,785,886,3551,27929,27930,46000</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=27286887$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://www.osti.gov/biblio/1069350$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Gaathon, O.</creatorcontrib><creatorcontrib>Adam, J.D.</creatorcontrib><creatorcontrib>Krishnaswamy, S.V.</creatorcontrib><creatorcontrib>Kysar, J.W.</creatorcontrib><creatorcontrib>Bakhru, S.</creatorcontrib><creatorcontrib>Bakhru, H.</creatorcontrib><creatorcontrib>Welch, D.O.</creatorcontrib><creatorcontrib>Osgood, R.M.</creatorcontrib><creatorcontrib>BROOKHAVEN NATIONAL LABORATORY (BNL)</creatorcontrib><title>Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties</title><title>Optical materials</title><description>► We demonstrate the exfoliation of high-quality single-crystal thin-films of YAG. ► Implantation dose and thermal exfoliation conditions were determined. ► Post-exfoliation high-temperature annealing process was optimized. ► Mechanical properties of the films were examined by nanoindentation technique.
We report on the fabrication of single-crystal thin films of Yttrium Aluminum Garnet (YAG, Y3Al5O12) obtained by thermal exfoliation from bulk crystals after deep He-ion implantation. The film qualities and exfoliation process were determined by AFM, optical microscopy, SEM, optical profilometer and nanoindentation. The resulting films were subjected to annealing at ∼1200°C to relax the residual strain and film curvature that arose from the ion implantation process.</description><subject>Crystal Ion Slicing</subject><subject>Exact sciences and technology</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Ion Implantation</subject><subject>Optical materials</subject><subject>Optics</subject><subject>Physics</subject><subject>Thin-film</subject><subject>Yttrium Aluminum Garnet</subject><issn>0925-3467</issn><issn>1873-1252</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNp9kM1KJDEUhYM4YNszbzCLMOCyyvxU0lUuBBH_oGVm4cZVSKduxjRVSZEEsd_elCUuXYVczpec-yH0m5KaEirP93WY8qhzzQhlNZE1Id0RWtF2wyvKBDtGK9IxUfFGbk7QaUp7QggTUq5Q-jdoryNOzv8foDLxkLIecH5xvrJuGBMOFj9f3eGwy9p56PHugF3w2I1TIbPO80X7viAQx4LCmw2D-5hf4EcwL9o7U-ZTDBPE7CD9RD-sHhL8-jzX6On25un6vtr-vXu4vtpWhkueK94LwymAaECQDTed5O1OUNbKXddQzWRrRSOsME3TEWZZb7nmDXBJNZHM8jX6szwbUnYqGZdLGRO8B5MVJbLjgpRQs4RMDClFsGqKbtTxUBJqlqv2apGrZrmKSFXkFuxswSadynI2am9c-mLZprRsi_41ulxyUPZ8dRDnHuAN9C7ONfrgvv_oHeyqkq4</recordid><startdate>20121101</startdate><enddate>20121101</enddate><creator>Gaathon, O.</creator><creator>Adam, J.D.</creator><creator>Krishnaswamy, S.V.</creator><creator>Kysar, J.W.</creator><creator>Bakhru, S.</creator><creator>Bakhru, H.</creator><creator>Welch, D.O.</creator><creator>Osgood, R.M.</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20121101</creationdate><title>Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties</title><author>Gaathon, O. ; Adam, J.D. ; Krishnaswamy, S.V. ; Kysar, J.W. ; Bakhru, S. ; Bakhru, H. ; Welch, D.O. ; Osgood, R.M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c363t-3d5c31ee54e5073c9638b51286b941a268f545f5c44902f2df3a34e361a062f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Crystal Ion Slicing</topic><topic>Exact sciences and technology</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Ion Implantation</topic><topic>Optical materials</topic><topic>Optics</topic><topic>Physics</topic><topic>Thin-film</topic><topic>Yttrium Aluminum Garnet</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gaathon, O.</creatorcontrib><creatorcontrib>Adam, J.D.</creatorcontrib><creatorcontrib>Krishnaswamy, S.V.</creatorcontrib><creatorcontrib>Kysar, J.W.</creatorcontrib><creatorcontrib>Bakhru, S.</creatorcontrib><creatorcontrib>Bakhru, H.</creatorcontrib><creatorcontrib>Welch, D.O.</creatorcontrib><creatorcontrib>Osgood, R.M.</creatorcontrib><creatorcontrib>BROOKHAVEN NATIONAL LABORATORY (BNL)</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Optical materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Gaathon, O.</au><au>Adam, J.D.</au><au>Krishnaswamy, S.V.</au><au>Kysar, J.W.</au><au>Bakhru, S.</au><au>Bakhru, H.</au><au>Welch, D.O.</au><au>Osgood, R.M.</au><aucorp>BROOKHAVEN NATIONAL LABORATORY (BNL)</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties</atitle><jtitle>Optical materials</jtitle><date>2012-11-01</date><risdate>2012</risdate><volume>35</volume><issue>1</issue><spage>25</spage><epage>28</epage><pages>25-28</pages><issn>0925-3467</issn><eissn>1873-1252</eissn><abstract>► We demonstrate the exfoliation of high-quality single-crystal thin-films of YAG. ► Implantation dose and thermal exfoliation conditions were determined. ► Post-exfoliation high-temperature annealing process was optimized. ► Mechanical properties of the films were examined by nanoindentation technique.
We report on the fabrication of single-crystal thin films of Yttrium Aluminum Garnet (YAG, Y3Al5O12) obtained by thermal exfoliation from bulk crystals after deep He-ion implantation. The film qualities and exfoliation process were determined by AFM, optical microscopy, SEM, optical profilometer and nanoindentation. The resulting films were subjected to annealing at ∼1200°C to relax the residual strain and film curvature that arose from the ion implantation process.</abstract><cop>Oxford</cop><pub>Elsevier B.V</pub><doi>10.1016/j.optmat.2012.06.009</doi><tpages>4</tpages></addata></record> |
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| subjects | Crystal Ion Slicing Exact sciences and technology Fundamental areas of phenomenology (including applications) Ion Implantation Optical materials Optics Physics Thin-film Yttrium Aluminum Garnet |
| title | Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties |
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