Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties

► We demonstrate the exfoliation of high-quality single-crystal thin-films of YAG. ► Implantation dose and thermal exfoliation conditions were determined. ► Post-exfoliation high-temperature annealing process was optimized. ► Mechanical properties of the films were examined by nanoindentation technique. We report on the fabrication of single-crystal thin films of Yttrium Aluminum Garnet (YAG, Y3Al5O12) obtained by thermal exfoliation from bulk crystals after deep He-ion implantation. The film qualities and exfoliation process were determined by AFM, optical microscopy, SEM, optical profilometer and nanoindentation. The resulting films were subjected to annealing at ∼1200°C to relax the residual strain and film curvature that arose from the ion implantation process.