Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)

The solid-state reaction and agglomeration of thin nickel-silicide films was investigated from sputter deposited nickel films (1-10 nm) on silicon-on-insulator (100) substrates. For typical anneals at a ramp rate of 3 ° C / s , 5-10 nm Ni films react with silicon and form NiSi, which agglomerates at 550 - 650 ° C , whereas films with a thickness of 3.7 nm of less were found to form an epitaxylike nickel-silicide layer. The resulting films show an increased thermal stability with a low electrical resistivity up to 800 ° C .