Crystallization of silicon oxide films using Al as a catalyst

Poly-Si films were fabricated through crystallization of silicon oxide (SiO x , 0 ≤ x

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of the Korean Physical Society 2021, 79(8), , pp.746-750
1. Verfasser:	Yoon, Jong-Hwan
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Amorphous silicon Catalysts Crystallization Mathematical and Computational Physics Original Paper - Condensed Matter Oxide coatings Particle and Nuclear Physics Physics Physics and Astronomy Polysilicon Silicon dioxide Silicon films Silicon oxides Silicon substrates Theoretical 물리학
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Beschreibung
Zusammenfassung:	Poly-Si films were fabricated through crystallization of silicon oxide (SiO x , 0 ≤ x
ISSN:	0374-4884 1976-8524
DOI:	10.1007/s40042-021-00280-2