Handy Calibration Substrate for both Horizontal and Vertical Probing

This article proposes a novel substrate for a handy SG-GS/SG-SG calibration in both horizontal and vertical probing measurement. The proposed substrate provides two ways of probing for “through” calibration in horizontal and vertical positions without changing the probe holders. It has “through” lin...

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Veröffentlicht in:Journal of semiconductor technology and science 2021, 21(2), 98, pp.109-118
Hauptverfasser: Pu, Bo, Kim, Taeho, Joo, Jinho, Nah, Wansoo
Format: Artikel
Sprache:eng
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Zusammenfassung:This article proposes a novel substrate for a handy SG-GS/SG-SG calibration in both horizontal and vertical probing measurement. The proposed substrate provides two ways of probing for “through” calibration in horizontal and vertical positions without changing the probe holders. It has “through” lines vertically and horizontally using vias and traces, respectively, and both “through” lines were designed to satisfy 50 ohms of characterization impedance. A prototype of the proposed substrate was fabricated using FR4 and then tested in the horizontal calibration resulting in the successful reproduction of all the S-parameters in the horizontal meander test board. It was also tested in the vertical calibration, and was successful to re-produce all the coupling effects in via arrays, demonstrating the effectiveness and handiness of the proposed calibration substrate. KCI Citation Count: 0
ISSN:1598-1657
2233-4866
DOI:10.5573/JSTS.2021.21.2.109