증착 후 전자-빔 조사 에너지에 따른 질화티타늄 박막의 특성

In this study, the effect of electron beam irradiation on surface properties, such as hardness, adhesion, and surface roughness, of TiN films was investigated. The films were deposited on an SKD-61 substrate through cathodic arc ion plating. After deposition, the films were bombarded with an intense electron beam under incident energies of 500, 1000, and 1500 eV for 10 min. From the results, the surface hardness increased up to 3357 HVIT at 1500 eV, and the critical load increased proportionally with irradiation energy from 15.8 to 23.4 N. In addition, the surface root-mean-square roughness of the films was significantly influenced by electron irradiation. Films subjected to electron irradiation at 1500 eV exhibited the lowest roughness of 397 nm. KCI Citation Count: 0