Design of Polycrystalline 3C-SiC Micro Beam Resonators with Corrugation

On the purpose of increasing resonant frequency without sacrificing quality factor as well as much decreasing dimensions, corrugated micro beam resonator based on polycrystalline 3C-SiC films is the applicable solution. In this work, appropriate corrugated structure is suggested to increase resonant frequency of resonators. Micro beam resonators based on 3C-SiC films which have a two-side corrugation along the length of beams were simulated by finite element method and compared to a same–size flat rectangular. With the dimension of 36x12x0.5 µm³, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, with this size but corrugation width of 6 µm and depth of 0.4 µm, the corrugated cantilever reaches the resonant frequency at 1.252 MHz. KCI Citation Count: 0