Multiple tube preparation characteristics of silica hydrogen permselective membrane

The multiple tube preparation of a silica membrane using a porous α -alumina tube as a support tube was carried out by chemical vapor deposition (CVD) to scale up the membrane reactor. A porous alumina tube with a pore size of 100 nm was modified by chemical vapor deposition using tetraethoxysilane as an Si source. The single-component permeance of H 2 and N 2 in the prepared silica membrane that was achieved by a multiple tube membrane preparation system was measured at 300–600 °C. Hydrogen permeance of the modified membrane at a permeation temperature of 600 °C was 5×10 −8 mol·Pa −1 ·m −2 ·s −1 . H 2 /N 2 selectivity at 600 °C was about 32. It was confirmed that permeance of H 2 and N 2 and the selectivity for H 2 to N 2 in the prepared silica membrane by the multiple tube membrane preparation system had almost the same value compared to those of the silica membrane prepared by the single-tube system.