Growth and Properties of Er-Doped Soda-Lime Glass Films Prepared by Radio-Frequency Magnetron Sputtering

Growth and Properties of Er-Doped Soda-Lime Glass Films Prepared by Radio-Frequency Magnetron Sputtering

We investigate the growth and properties of Er-doped soda-lime glass films on Si prepared by a radio-frequency magnetron sputtering method with systematically varied deposition parameters. Deposition rate was found to be very sensitive to substrate temper

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Bibliographische Detailangaben
Veröffentlicht in:Metals and materials international 2004, 10(3), , pp.275-279
Hauptverfasser: Jong Mo Im, Jong Ha Moon, Byung Teak Lee, Sang Sub Kim, Jin Hyeok Kim
Format: Artikel
Sprache:kor
Schlagworte:
deposition
erbium doped soda-lime glass
sputtering
재료공학
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Beschreibung
Zusammenfassung:We investigate the growth and properties of Er-doped soda-lime glass films on Si prepared by a radio-frequency magnetron sputtering method with systematically varied deposition parameters. Deposition rate was found to be very sensitive to substrate temper
ISSN:1598-9623
2005-4149