Tapered Coating for Nano-electro-mechanical (NEM) Relay to Improve Energy-delay Product

The impact of beam coating on the energy–delay characteristic is investigated and quantitatively evaluated. In order to improve the energy–delay product, a vertically oriented nanoelectromechanical (NEM) relay with tapered coating is proposed, including its brief fabrication processes. The tapered coated beam, which has an effective spring constant identical to that an evenly coated beam but with lower effective mass, shows less energy dissipation for a given delay time. Furthermore, using the tapered coated beam structure can alleviate the stability problem because the von Mises stress is lower in the tapered coated beam than in the evenly coated beam in the pull-in state. KCI Citation Count: 0