Dimension Tolerances in Fabrication of Polymer Microfluidic Devices

In this paper, we discuss about critical issues in fabrication of polymer microfluidic devices which affect the dimensions of the microchannel and hence the volumetric analysis of the fluids. The optical and thermal properties of the materials used in the fabrication of devices determine the final structural dimensions and the reliability of the fabricated devices. A clear understanding of material properties and their effect on the dimensional variations of microfluidic devices during fabrication are essential in different applications such as micro dispensers, micro pump, micro mixers and micro reactors. It is possible to obtain microfluidic devices with perfect dimensions by carrying out the fabrication processes with perfect timing control and precisely controlled temperature during fabrication. This paper focuses on the dimensional stability of SU8 prime mould with respect to UV exposure time, effect of temperature on PDMS replicas and the effective sealing of the device by adhesive bonding. KCI Citation Count: 2