Analysis of vibration characteristics of one-axis heavy duty stages

This study focus on the dynamic characteristics of one-axis stages with its heavy duty top plate over 300 kg. A simplified modeling of one-axis heavy duty stages for machine tools is suggested to understand the characteristics of the vibration in the heavy duty stage. The equivalent finite element model for LM guide bearings is applied to analyze the dynamic characteristics of the precision stage. Moreover, the role of screw bolts which fasten the positions between LM guide rails and the main table is also discussed. The suggested modeling shows below 11.8 % error from the measured result values of the modal experiments.