Simulation and Design of a Multilayer Piezoelectric Actuator

In this study, two- and three-layer ceramic piezoelectric actuators were designed and simulated according toSUS316 thickness, actuator width, and mass using ATILA software in order to develop a piezoelectric actuator forhaptic application. Numerical modelling based on the finite element method was performed to find the resonancefrequencies and modal shapes of the actuator. The resonance frequency was affected by the thickness of theSUS316 plate and mass. On the other hand, the width of the actuator did not have a significant impact. Maximumdisplacements were generated at the center of a haptic three-layer ceramic piezoelectric actuator. The two-layerceramic piezoelectric actuator with a mass of 2.6 g was suitable as 16.28 μm㎛ at 265 Hz for haptic sensation application. KCI Citation Count: 0