Vibrational Properties of Amorphous CNx:H Films by Fourier Transform Infrared Spectroscopy
Hydrogenated amorphous carbon nitride (a-CNx : H) lms were prepared by means of a reactive RF magnetron sputtering system with DC bias at various deposition conditions. The lms were found to be amorphous by X-ray diraction (XRD). From FTIR spectra of hydrogenated CN samples, CHx and NHx groups showe...
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| Veröffentlicht in: | Journal of the Korean Physical Society 2004, 45(2), , pp.1268-1271 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | kor |
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| Zusammenfassung: | Hydrogenated amorphous carbon nitride (a-CNx : H) lms were prepared by means of a reactive
RF magnetron sputtering system with DC bias at various deposition conditions. The lms were
found to be amorphous by X-ray diraction (XRD). From FTIR spectra of hydrogenated CN samples,
CHx and NHx groups showed the stretching vibrations at 3,000 and 3,400 cm KCI Citation Count: 4 |
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| ISSN: | 0374-4884 1976-8524 |