Development of a Uniform Irradiation System Using a Rotatable Stage
The conventional irradiation system has adopted electrostatic magnets for the ion beam scanning. In this study, we developed a unique irradiation system using a rotatable stage which makes it possible to realize wobbling and spiral scanning. The uniform irradiation area is not limited in principle b...
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| Veröffentlicht in: | Journal of the Korean Physical Society 2006, 48(4), , pp.772-776 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
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| Online-Zugang: | Volltext |
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| Zusammenfassung: | The conventional irradiation system has adopted electrostatic magnets for the ion beam scanning.
In this study, we developed a unique irradiation system using a rotatable stage which makes it
possible to realize wobbling and spiral scanning. The uniform irradiation area is not limited in
principle because the scanning is performed not by the magnetic field but by the combined motion
of a mechanical stage. We were able to acquire an irradiation area larger than 20 cm in diameter
with a uniformity above 90 %.? KCI Citation Count: 8 |
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| ISSN: | 0374-4884 1976-8524 |