Micropatterning of Spin-Coated Hybrid Materials by Using an UV Polymerization Technique

Hybrid organic-inorganic materials are promising candidates and if their properties are tailored, several diffrent submicron planar optical passive and active devices, such as waveguides, ampli- fiers, splitters and couplers can be produced. In this present study, we report on sol-gel-derived organic-inorganic materials made from vinyltriethoxysilane (VTES). The lms were deposited on glass substrates by using a spin-coating technique. The lm densification was done at 300℃ and a patterned waveguide structure was fabricated by using UV-irradiation through a negative photomask. The SEM micrograph shows that channel patterns with a width of about 8 m were formed by etching of the unirradiated regions of the films. KCI Citation Count: 5