The Influence of the Resonant Frequency of a Tube-Type Piezo Actuator on Atomic Force Microscope Anodization Lithography

The lithographic scan speed is an important factor in determining applications of the anodization lithographic process using atomic force microscope (AFM). Also, an understanding of the dynamic behavior of the piezoelectric tube scanner is necessary for high-speed lithography. In this letter, we investigated the effect of the resonant frequency of a piezoelectric tube scanner on the fabrication of nanostructures by using AFM anodization lithography. The resonant frequency of the piezoelectric tube scanner was calculated by using the oscillation phenomenon, which was determined by observing the periodic stripe image at high-speed scanning. According to the results of patterning, a sway-shaped lithographic nanostructure was generated at almost the same resonant frequency as that of the piezoelectric tube scanner. It is clear that the shape of the nanostructures can be determined by using the resonant frequency of the piezoelectric tube scanner. The influence of the resonant frequency of the piezoelectric tube scanner should, thus, be considered in nano-patterning processes using AFM lithography. KCI Citation Count: 1