Thermal Degradation Behavior of Aluminum-Doped Zinc-Oxide Thin Films Prepared by Using a Sol-Gel Process

The present research reports the thermal degradation behavior of aluminum-doped zinc-oxide (AZO) thin films coated on glass substrates by using a sol-gel method. The thermal degradation behavior was investigated through changes in the resistivity of the thermally degraded AZO films, which were compared with that of normal one. The thermal degradation of AZO lms is discussed based on the results of scanning electron microscope (SEM), atomic force microscope (AFM), X-ray diraction (XRD) and Hall effect measurements. KCI Citation Count: 5