Transparent Ti-doped In2O3 films grown by linear facing target sputtering for organic solar cells

The electrical, optical, and structural properties of Ti-doped In 2 O 3 (TIO) films grown by linear facing target sputtering (LFTS) were investigated as a function of the DC power and the annealing temperature for use as a transparent anode in organic solar cells (OSCs). By rapid thermal annealing at 600 °C, we obtained optimized TIO anodes with a sheet resistance of 26.08 Ohm/square and an optical transmittance of 84.88%, which are acceptable for OSC fabrication. The effective Ti dopant activation and the crystallization of the TIO film led to a reduced resistivity of the TIO films. The OSC fabricated on the optimized TIO film showed a higher power conversion efficiency of 2.576% compared to the OSC with as-deposited TIO anodes (1.645%) because the fill factors of the OSCs critically depend on the sheet resistance of the anode. Successful fabrication of OSCs with TIO anodes indicates that the LFTS-grown TIO film is a promising transparent anode for OSCs.