Enhanced electrical properties of AZO thin films grown on different substrates by using a facing-target sputtering system with hetero targets
Al-doped ZnO (AZO) films were deposited on glass, polyethylene naphthalate (PEN) and polyethylene terephthalate (PET) at room temperature by using conventional rf-magneton sputtering (CMS) and a facing-target sputtering (FTS) with hetero targets of Al 2 O 3 and ZnO. Their structural, surface morphol...
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Veröffentlicht in: | Journal of the Korean Physical Society 2015, 67(6), , pp.1007-1012 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Al-doped ZnO (AZO) films were deposited on glass, polyethylene naphthalate (PEN) and polyethylene terephthalate (PET) at room temperature by using conventional rf-magneton sputtering (CMS) and a facing-target sputtering (FTS) with hetero targets of Al
2
O
3
and ZnO. Their structural, surface morphology, electrical and optical properties were characterized by using X-ray diffractometry (XRD), atomic force microscopy (AFM), Hall-effect measurement and ultravioletvisible spectrophotometry, respectively. The films exhibit highly c-axis preferred orientation and a closely packed nanocrystalline. Structure the FTS-films deposited on plastic substrate are found to receive much less stress due to bombardment of high-energy particles compress to the CMS-films deposited on plastic substrates, during the sputtering process, which can enhance the electrical properties and crystalline quality of the FTS-films compared with those of the CMS-films. The resistivities of the FTS-films are 6.50 × 10
−4
Ω·cm on glass, 7.0 × 10
−4
Ω·cm on PEN and 7.4 × 10
−4
Ω·cm on PET while the values for the CMS-films are 7.6 × 10
−4
Ω·cm on glass, 1.20 × 10
−3
Ω·cm on PEN and 1.58 × 10
−3
Ω·cm on PET. |
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ISSN: | 0374-4884 1976-8524 |
DOI: | 10.3938/jkps.67.1007 |