A high transmission power stabilizer using brewster window for a UV pulsed laser in long-term drift

In this study, we developed a high transmission power stabilizer equipped with a Brewster window incorporating a proportional-integral-derivative (PID) controller. We used a 248 nm KrF excimer laser signals collected by a photodiode detector (PD) to stabilize the power fluctuation of pulsed laser in...

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Veröffentlicht in:	Journal of mechanical science and technology 2011, 25(8), , pp.2121-2125
Hauptverfasser:	Lee, Hyungwoo, Ryoo, Hoonchul, Hahn, Jae W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Attenuation Circuit properties Control Control equipment Drift Dynamical Systems Electric, optical and optoelectronic circuits Electronics Engineering Exact sciences and technology Excimer lasers Fluctuation Industrial and Production Engineering Integrated optics. Optical fibers and wave guides Mechanical Engineering Optical and optoelectronic circuits Photodiode detectors Proportional integral derivative Pulsed lasers Vibration 기계공학
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Beschreibung
Zusammenfassung:	In this study, we developed a high transmission power stabilizer equipped with a Brewster window incorporating a proportional-integral-derivative (PID) controller. We used a 248 nm KrF excimer laser signals collected by a photodiode detector (PD) to stabilize the power fluctuation of pulsed laser in long-term drift situation. The power fluctuation averaged 2.73% after 45 minutes of uninterrupted operation. However, with the power stabilizer, the power fluctuation averaged 0.97%. The power stabilizer exhibited a maximum transmission rate of 96.9% which is better than that of conventional one and the maximum attenuated optical transmission reached 65.6%.
ISSN:	1738-494X 1976-3824
DOI:	10.1007/s12206-011-0622-6