Microfabrication of solenoid-type RF SMD chip inductors with an Al2O3 core

We investigated micron size, high-performance, and solenoid-type radio-frequency surface-mounted device (SMD) chip inductors with a low-loss Al₂O₃ core for a GHz drive microwave circuit application. Copper coils with a diameter of 27 lm were used and the chip inductors fabricated in this study are 0...

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Veröffentlicht in:Current applied physics 2008, 8(5), , pp.631-636
Hauptverfasser: Kim, Jae-Wook, Jung, Myung-Hee, Park, Nho Kyung, Yun, Eui-Jung
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Sprache:eng
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Zusammenfassung:We investigated micron size, high-performance, and solenoid-type radio-frequency surface-mounted device (SMD) chip inductors with a low-loss Al₂O₃ core for a GHz drive microwave circuit application. Copper coils with a diameter of 27 lm were used and the chip inductors fabricated in this study are 0.86 × 0.46 × 0.45 mm³. The high-frequency characteristics of the inductance (L), quality factor (Q), and impedance (Z) of the developed inductors were measured using a RF impedance/material analyzer (HP4291B with HP16193A test fixture). The developed inductors have a self-resonant frequency of 3.7–5.2 GHz and exhibit L of 15–34 nH. The inductors have Q of 38–49 over the frequency ranges of 900 MHz–1.7 GHz. The calculated data obtained from the equivalent circuit and the derived equation of Q described the high-frequency data of L, Q, and Z of the inductors developed quite well. KCI Citation Count: 7
ISSN:1567-1739
1878-1675
DOI:10.1016/j.cap.2007.11.005