Radiation effect on the polymer-based capacitive relative humidity sensors

The sensitivity of polymer-based capacitive relative humidity (RH) sensors after irradiation with neutrons, electrons and protons was measured. Degradation consists of the decreasing of the upper RH limit that can be measured. At the same time, low RH-level sensitivity is almost stable. After 30 krad of absorption dose, RH cut off is equal to 85% of max value, after 60 krad–40%. Degradation reduces after annealing which indicates high radiation sensitivity of the internal circuit in comparison to RH-sensing polymer film.