Characterizing Deformable Mirrors for the MagAO-X Instrument

The MagAO-X instrument is a new extreme adaptive optics system for high-contrast imaging at visibleand near-infrared wavelengths on the Magellan Clay Telescope. A central component of this system is a 2040-actuatormicroelectromechanical deformable mirror (DM) from Boston Micromachines Corp. that operates at 3.63 kHz forhigh-order wavefront control (the tweeter). Two additional DMs from ALPAO perform the low-order (the woofer)and non-common-path science-arm wavefront correction (the NCPC DM). Prior to integration with the instrument, wecharacterized these devices using a Zygo Verifire Interferometer to measure each DM surface. We present the resultsof the characterization effort here, demonstrating the ability to drive tweeter to a flat of 6.9 nm RMS surface (and 0.56nm RMS surface within its control bandwidth), the woofer to 2.2 nm root mean square (RMS) surface, and the NCPCDM to 2.1 nm RMS surface over the MagAO-X beam footprint on each device. Using focus-diversity phase retrievalon the MagAO-X science cameras to estimate the internal instrument wavefront error (WFE), we further show that theintegrated DMs correct the instrument WFE to 18.7 nm RMS, which, combined with a 11.7% pupil amplitude RMS,produces a Strehl ratio of 0.94 at H↵