Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5gm silicon nitride micro-shutter for use in a spacebased Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go from the closed, 0 degree, position, to the open, 90 degr...

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Hauptverfasser: Loughlin, James P., Fettig, Rainer K., Moseley, S. Harvey, Kutyrev, Alexander S., Mott, D. Brent, Obenschain, Arthur F.
Format: Report
Sprache:eng
Schlagworte:
Composite Materials
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Zusammenfassung:Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5gm silicon nitride micro-shutter for use in a spacebased Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go from the closed, 0 degree, position, to the open, 90 degree position. Stresses in the torsion hinge are determined with a large deformation nonlinear finite element model. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.