Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns

Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns

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Veröffentlicht in:CHEMISTRY OF MATERIALS 2024-06, Vol.36 (12), p.5943-5952
Hauptverfasser: Sinha, Jyoti, Gallis, Leonidas, Clerix, Jan-Willem J, van der Veen, Marleen, Innocent, Jerome, Illiberi, Andrea, Givens, Michael, Nyns, Laura, Delabie, Annelies
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container_title CHEMISTRY OF MATERIALS
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creator Sinha, Jyoti
Gallis, Leonidas
Clerix, Jan-Willem J
van der Veen, Marleen
Innocent, Jerome
Illiberi, Andrea
Givens, Michael
Nyns, Laura
Delabie, Annelies
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title Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns
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