Chemical Vapor Deposition and High-Resolution Patterning of a Highly Conductive Two-Dimensional Coordination Polymer Film

Crystalline coordination polymers with high electrical conductivities and charge carrier mobilities might open new opportunities for electronic devices. However, current solvent-based synthesis methods hinder compatibility with microfabrication standards. Here, we describe a solvent-free chemical va...

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Veröffentlicht in:JOURNAL OF THE AMERICAN CHEMICAL SOCIETY 2023-01, Vol.145 (1), p.152-159
Hauptverfasser: Rubio-Gimenez, Victor, Arnauts, Giel, Wang, Mingchao, Mata, Eduardo Sergio Oliveros, Huang, Xing, Lan, Tianshu, Tietze, Max L, Kravchenko, Dmitry E, Smets, Jorid, Wauteraerts, Nathalie, Khadiev, Azat, Novikov, Dmitri, Makarov, Denys, Dong, Renhao, Ameloot, Rob
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container_title JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
container_volume 145
creator Rubio-Gimenez, Victor
Arnauts, Giel
Wang, Mingchao
Mata, Eduardo Sergio Oliveros
Huang, Xing
Lan, Tianshu
Tietze, Max L
Kravchenko, Dmitry E
Smets, Jorid
Wauteraerts, Nathalie
Khadiev, Azat
Novikov, Dmitri
Makarov, Denys
Dong, Renhao
Ameloot, Rob
description Crystalline coordination polymers with high electrical conductivities and charge carrier mobilities might open new opportunities for electronic devices. However, current solvent-based synthesis methods hinder compatibility with microfabrication standards. Here, we describe a solvent-free chemical vapor deposition method to prepare high-quality films of the two-dimensional conjugated coordination polymer Cu-BHT (BHT = benzenehexanothiolate). This approach involves the conversion of a metal oxide precursor into Cu-BHT nanofilms with a controllable thickness (20-85 nm) and low roughness (
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title Chemical Vapor Deposition and High-Resolution Patterning of a Highly Conductive Two-Dimensional Coordination Polymer Film
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