Chemical Vapor Deposition and High-Resolution Patterning of a Highly Conductive Two-Dimensional Coordination Polymer Film

Crystalline coordination polymers with high electrical conductivities and charge carrier mobilities might open new opportunities for electronic devices. However, current solvent-based synthesis methods hinder compatibility with microfabrication standards. Here, we describe a solvent-free chemical va...

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Veröffentlicht in:JOURNAL OF THE AMERICAN CHEMICAL SOCIETY 2023-01, Vol.145 (1), p.152-159
Hauptverfasser: Rubio-Gimenez, Victor, Arnauts, Giel, Wang, Mingchao, Mata, Eduardo Sergio Oliveros, Huang, Xing, Lan, Tianshu, Tietze, Max L, Kravchenko, Dmitry E, Smets, Jorid, Wauteraerts, Nathalie, Khadiev, Azat, Novikov, Dmitri, Makarov, Denys, Dong, Renhao, Ameloot, Rob
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Sprache:eng
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Zusammenfassung:Crystalline coordination polymers with high electrical conductivities and charge carrier mobilities might open new opportunities for electronic devices. However, current solvent-based synthesis methods hinder compatibility with microfabrication standards. Here, we describe a solvent-free chemical vapor deposition method to prepare high-quality films of the two-dimensional conjugated coordination polymer Cu-BHT (BHT = benzenehexanothiolate). This approach involves the conversion of a metal oxide precursor into Cu-BHT nanofilms with a controllable thickness (20-85 nm) and low roughness (
ISSN:0002-7863