Single- and multilayer graphene wires as alternative interconnects

© 2016 Elsevier B.V. All rights reserved. In this work, we evaluate the material properties of graphene and assess the potential application of graphene to replace copper wires in Back-End-Of-Line (BEOL) interconnects. Based on circuit and system-level simulations, high restrictions are imposed to g...

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Veröffentlicht in:	Microelectronic Engineering 2016, Vol.156, p.131-135
Hauptverfasser:	Politou, Maria, Asselberghs, Inge, Soree, Bart, Lee, Chang Seung, Sayan, Safak, Lin, Dennis, Pashaei, Parham, Huyghebaert, Cedric, Raghavan, Praveen, Radu, Iuliana, Tokei, Zsolt, De Gendt, Stefan, Heyns, Marc
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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