Deep Reactive Ion Etching

Deep Reactive Ion Etching

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Lindroos Veikko, Tilli Markku, Franssila Sami, Paulasto-Kröckel Mervi, Airaksinen Veli-Matti, Motooka Teruaki
Format: Buchkapitel
Sprache:eng
Schlagworte:
Machine Design
Mechanics & Mechanical Engineering
Micro
Nanofabrication & Manufacturing
Nanotechnology
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 1
container_issue
container_start_page 1
container_title
container_volume
creator Lindroos Veikko
Tilli Markku
Franssila Sami
Paulasto-Kröckel Mervi
Airaksinen Veli-Matti
Motooka Teruaki
description
doi_str_mv 10.1016/B978-0-323-29965-7.00021-X
format Book Chapter
fullrecord <record><control><sourceid>knovel</sourceid><recordid>TN_cdi_knovel_primary_chapter_kt00UQU3F1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>chapter_kt00UQU3F1</sourcerecordid><originalsourceid>FETCH-LOGICAL-k103t-b0e5576c50bfef4bfa55e3adaf58a8eb17e699875ee269a23d021da25f4c26783</originalsourceid><addsrcrecordid>eNotjk1Lw0AYhFdEUGt-gLfgqZet7-52v45aWy0URDHgLWw279qYmoZkKfjvXauXGYZnGIaQGwYzBkzd3lttKFDBBeXWKkn1DAA4o-8nJEsMEhGMJzkll7_h2OLnJBvHz9RkWmtl9QW5fkDs81d0PjYHzNf7Ll9Gv226jytyFtxuxOzfJ6RYLd8WT3Tz_Lhe3G1oy0BEWgFKqZWXUAUM8yo4KVG42gVpnMGKaVTWGi0RubKOizrdrB2XYe650kZMyPRvt-32B9yV_dB8ueG79FvXRxzKNgIUL4VYMfEDI9xDDg</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>book_chapter</recordtype></control><display><type>book_chapter</type><title>Deep Reactive Ion Etching</title><source>Knovel Library - for Corporate and Government Institutions</source><creator>Lindroos Veikko ; Tilli Markku ; Franssila Sami ; Paulasto-Kröckel Mervi ; Airaksinen Veli-Matti ; Motooka Teruaki</creator><creatorcontrib>Lindroos Veikko ; Tilli Markku ; Franssila Sami ; Paulasto-Kröckel Mervi ; Airaksinen Veli-Matti ; Motooka Teruaki</creatorcontrib><edition>2nd Edition</edition><identifier>ISBN: 0323299652</identifier><identifier>ISBN: 9780323299657</identifier><identifier>EISBN: 9780323312233</identifier><identifier>EISBN: 0323312233</identifier><identifier>DOI: 10.1016/B978-0-323-29965-7.00021-X</identifier><language>eng</language><publisher>Elsevier</publisher><subject>Machine Design ; Mechanics &amp; Mechanical Engineering ; Micro ; Nanofabrication &amp; Manufacturing ; Nanotechnology</subject><ispartof>Handbook of Silicon Based MEMS Materials and Technologies, 2015, p.1-1</ispartof><rights>2015</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://content.knovel.com/content/Thumbs/thumb8695.gif</thumbnail><link.rule.ids>775,776,780,789,11423,27905</link.rule.ids></links><search><creatorcontrib>Lindroos Veikko</creatorcontrib><creatorcontrib>Tilli Markku</creatorcontrib><creatorcontrib>Franssila Sami</creatorcontrib><creatorcontrib>Paulasto-Kröckel Mervi</creatorcontrib><creatorcontrib>Airaksinen Veli-Matti</creatorcontrib><creatorcontrib>Motooka Teruaki</creatorcontrib><title>Deep Reactive Ion Etching</title><title>Handbook of Silicon Based MEMS Materials and Technologies</title><subject>Machine Design</subject><subject>Mechanics &amp; Mechanical Engineering</subject><subject>Micro</subject><subject>Nanofabrication &amp; Manufacturing</subject><subject>Nanotechnology</subject><isbn>0323299652</isbn><isbn>9780323299657</isbn><isbn>9780323312233</isbn><isbn>0323312233</isbn><fulltext>true</fulltext><rsrctype>book_chapter</rsrctype><creationdate>2015</creationdate><recordtype>book_chapter</recordtype><sourceid/><recordid>eNotjk1Lw0AYhFdEUGt-gLfgqZet7-52v45aWy0URDHgLWw279qYmoZkKfjvXauXGYZnGIaQGwYzBkzd3lttKFDBBeXWKkn1DAA4o-8nJEsMEhGMJzkll7_h2OLnJBvHz9RkWmtl9QW5fkDs81d0PjYHzNf7Ll9Gv226jytyFtxuxOzfJ6RYLd8WT3Tz_Lhe3G1oy0BEWgFKqZWXUAUM8yo4KVG42gVpnMGKaVTWGi0RubKOizrdrB2XYe650kZMyPRvt-32B9yV_dB8ueG79FvXRxzKNgIUL4VYMfEDI9xDDg</recordid><startdate>2015</startdate><enddate>2015</enddate><creator>Lindroos Veikko</creator><creator>Tilli Markku</creator><creator>Franssila Sami</creator><creator>Paulasto-Kröckel Mervi</creator><creator>Airaksinen Veli-Matti</creator><creator>Motooka Teruaki</creator><general>Elsevier</general><scope/></search><sort><creationdate>2015</creationdate><title>Deep Reactive Ion Etching</title><author>Lindroos Veikko ; Tilli Markku ; Franssila Sami ; Paulasto-Kröckel Mervi ; Airaksinen Veli-Matti ; Motooka Teruaki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-k103t-b0e5576c50bfef4bfa55e3adaf58a8eb17e699875ee269a23d021da25f4c26783</frbrgroupid><rsrctype>book_chapters</rsrctype><prefilter>book_chapters</prefilter><language>eng</language><creationdate>2015</creationdate><topic>Machine Design</topic><topic>Mechanics &amp; Mechanical Engineering</topic><topic>Micro</topic><topic>Nanofabrication &amp; Manufacturing</topic><topic>Nanotechnology</topic><toplevel>online_resources</toplevel><creatorcontrib>Lindroos Veikko</creatorcontrib><creatorcontrib>Tilli Markku</creatorcontrib><creatorcontrib>Franssila Sami</creatorcontrib><creatorcontrib>Paulasto-Kröckel Mervi</creatorcontrib><creatorcontrib>Airaksinen Veli-Matti</creatorcontrib><creatorcontrib>Motooka Teruaki</creatorcontrib></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lindroos Veikko</au><au>Tilli Markku</au><au>Franssila Sami</au><au>Paulasto-Kröckel Mervi</au><au>Airaksinen Veli-Matti</au><au>Motooka Teruaki</au><format>book</format><genre>bookitem</genre><ristype>CHAP</ristype><atitle>Deep Reactive Ion Etching</atitle><btitle>Handbook of Silicon Based MEMS Materials and Technologies</btitle><date>2015</date><risdate>2015</risdate><spage>1</spage><epage>1</epage><pages>1-1</pages><isbn>0323299652</isbn><isbn>9780323299657</isbn><eisbn>9780323312233</eisbn><eisbn>0323312233</eisbn><pub>Elsevier</pub><doi>10.1016/B978-0-323-29965-7.00021-X</doi><tpages>1</tpages><edition>2nd Edition</edition></addata></record>
fulltext fulltext
identifier ISBN: 0323299652
ispartof Handbook of Silicon Based MEMS Materials and Technologies, 2015, p.1-1
issn
language eng
recordid cdi_knovel_primary_chapter_kt00UQU3F1
source Knovel Library - for Corporate and Government Institutions
subjects Machine Design
Mechanics & Mechanical Engineering
Micro
Nanofabrication & Manufacturing
Nanotechnology
title Deep Reactive Ion Etching
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-21T10%3A14%3A36IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-knovel&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=bookitem&rft.atitle=Deep%20Reactive%20Ion%20Etching&rft.btitle=Handbook%20of%20Silicon%20Based%20MEMS%20Materials%20and%20Technologies&rft.au=Lindroos%20Veikko&rft.date=2015&rft.spage=1&rft.epage=1&rft.pages=1-1&rft.isbn=0323299652&rft.isbn_list=9780323299657&rft_id=info:doi/10.1016/B978-0-323-29965-7.00021-X&rft_dat=%3Cknovel%3Echapter_kt00UQU3F1%3C/knovel%3E%3Curl%3E%3C/url%3E&rft.eisbn=9780323312233&rft.eisbn_list=0323312233&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true