Silicon Based BioMEMS: Micromachining Technologies

Silicon Based BioMEMS: Micromachining Technologies

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Hauptverfasser: Lindroos Veikko, Lehto Ari, Tilli Markku, Motooka Teruaki
Format: Buchkapitel
Sprache:eng
Schlagworte:
Machine Design
Mechanics & Mechanical Engineering
Micro
Nanofabrication & Manufacturing
Nanotechnology
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creator Lindroos Veikko
Lehto Ari
Tilli Markku
Motooka Teruaki
description
doi_str_mv 10.1016/B978-0-8155-1594-4.00029-2
format Book Chapter
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identifier ISBN: 0815515944
ispartof Handbook of Silicon Based MEMS Materials and Technologies, 2010, p.1-1
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source Knovel Library - for Corporate and Government Institutions; O'Reilly Online Learning: Academic/Public Library Edition
subjects Machine Design
Mechanics & Mechanical Engineering
Micro
Nanofabrication & Manufacturing
Nanotechnology
title Silicon Based BioMEMS: Micromachining Technologies
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