Advances in Plasma Synthesis of UNCD Films

Advances in Plasma Synthesis of UNCD Films

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Hauptverfasser: Shenderova Olga A, Gruen Dieter M
Format: Buchkapitel
Sprache:eng
Schlagworte:
Chemistry & Chemical Engineering
Electronic Devices
Electronics & Semiconductors
Micro
Nanofabrication & Manufacturing
Nanotechnology
Physical Chemistry
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creator Shenderova Olga A
Gruen Dieter M
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doi_str_mv 10.1016/B978-1-4377-3465-2.00002-5
format Book Chapter
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identifier ISBN: 1437734650
ispartof Ultrananocrystalline Diamond - Synthesis, Properties, and Applications, 2012, p.1-1
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source Knovel Library - for Corporate and Government Institutions
subjects Chemistry & Chemical Engineering
Electronic Devices
Electronics & Semiconductors
Micro
Nanofabrication & Manufacturing
Nanotechnology
Physical Chemistry
title Advances in Plasma Synthesis of UNCD Films
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