초음파분무열분해법에 의한 TPSZ의 합성 및 특성

The fine particles of binary ceramic composite of titania-partially-stabilized zirconia(TPSZ) were synthesized by ultrasonic spray pyrolysis at the various temperatures, compositions and concentrations and the effects of process factors for synthesis on the characteristics of fine particles were discussed. The starting salt solutions were prepared to have the ionic concentrations of 0.025~0.1 M aqueous solutions. The fine particles were prepared to have the compositions of 90~97.5 wt% of $ZrO_2$ and 2.5~10 wt% of $TiO_2$. The temperatures for particle synthesis were regulated to be 400~550$^{\circ}C$ as a drying zone, 800~1100$^{\circ}C$ as a pyrolysis zone. The produced fine particles were collected by a wet process and analyzed to investigate characteristic properties after being dried. The compositions of ceramic fine particles were determined by Inductively Coupled Plasma-Atomic Emission Spectroscopy(ICP-AES) technique and phases, morphologies and particle sizes of those were investigated by Raman Spectroscopy, X-ray diffraction(XRD), Scanning Electron Microscopy(SEM), Transmission Electron Microscopy(TEM) and Particle Size Analyzer(PSA) techniques. 여러 가지 온도, 조성 및 농도에서 이성분계 세라믹 복합체 TPSZ(titania partially-stabilized zirconia)의 미분말을 초음파분무열분해법에 의하여 합성하였으며, 합성공정인자가 분체특성에 미치는 영향을 검토하고, 합성된 분체의 특성을 조사하였다. 출발용액의 제조는 금속염의 농도가 0.025~0.1 M이 되도록 증류수에 용해하고, 그 조성비는 $ZrO_2$ 90~97.5 wt%에 $TiO_2$ 2.5~10 wt%가 되도록 하였다. 합성시 열분해 영역에서의 온도는 건조부가 400~550$^{\circ}C$, 반응부는 800~1100$^{\circ}C$로 하였으며, 합성된 분체는 습식으로 포집하여 110$^{\circ}C$에서 3시간 동안 건조하였다. 합성된 미분체의 특성을 Raman Spectroscopy, X-ray diffraction(XRD), Scanning Electron Microscopy(SEM), Transmission Electron Microscopy (TEM) 및 Particle Size Analyzer(PSA)로써 조사하였고, Inductively Coupled Plasma-Atomic Emission Spectroscopy(ICP-AES)로써 순도 및 조성을 분석하였다.