Growth of (111) One-Axis-Oriented Bi(Mg1/2Ti1/2)O3 Films on (100)Si Substrates

Films of a high-pressure perovskite phase, Bi(Mg 1/2 Ti 1/2 )O 3 , were prepared on (111) \text{c -oriented SuRuO 3 -coated (111)Pt/TiO 2 /SiO 2 /(100)Si substrates. The perovskite Bi(Mg 1/2 Ti 1/2 )O 3 films had a (111) one-axis orientation, because their constituent grains were epitaxially grown on (111) \text{c -oriented perovskite SrRuO 3 ones. The remanent polarization and piezoelectric constant measured at an applied electric field of 600 kV/cm were about 30 μC/cm 2 and 40 pm/V, respectively. A remarkable phase transition was not observed from room temperature to 350 °C in a (111) one-axis-oriented Bi(Mg 1/2 Ti 1/2 )O 3 film, suggesting that the Curie temperature of this film is above 350 °C.